Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system

ABSTRACT

A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.

This application is a continuation of U.S. patent application Ser. No.10/352,638, entitled “Broad Band Deep Ultraviolet/Vacuum UltravioletCatadioptric Imaging System,” filed on Jan. 27, 2003, now U.S. Pat. No.6,801,358, which is a continuation of U.S. patent application Ser. No.09/349,036, entitled “Broad Band Deep Ultraviolet/Vacuum UltravioletCatadioptric Imaging System,” filed on Jul. 7, 1999, now U.S. Pat. No.6,512,631, which is a continuation in part of U.S. patent applicationSer. No. 09/046,814, entitled “High NA System for Multiple ModeImaging,” filed on Mar. 24, 1998, now U.S. Pat. No. 6,064,517, which isa continuation in part of U.S. patent application Ser. No. 08/908,247,entitled “Ultra-Broadband UV Microscope Imaging System with Wide RangeZoom Capability,” filed on Aug. 7, 1997, now U.S. Pat. No. 5,999,310,which is a continuation in part of U.S. patent application Ser. No.08/681,528, entitled “Broad Spectrum Ultraviolet Catadioptric ImagingSystem,” filed on Jul. 22, 1996, now U.S. Pat. No. 5,717,518, all ofwhich are hereby incorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to the field of optical imagingand more particularly to catadioptric optical systems used forbright-field and dark-field imaging applications.

2. Description of the Related Art

Many optical and electronic systems exist to inspect object surfaces fordefects such as those on a partially fabricated integrated circuit or aphotomask. Defects may take the form of particles randomly localized onthe surface of the circuit or photomask, as well as scratches, processvariations, and so forth. Various imaging techniques used to performsurface inspection for such defects provide different advantagesdepending on the types of defects present.

Two well known imaging techniques for detecting defects are bright fieldimaging and dark field imaging. Bright field imaging is commonly used inmicroscope systems. The advantage of bright field imaging is the imageproduced is readily distinguishable. The size of image featuresaccurately represents the size of object features multiplied by themagnification of the optical system. Bright field imaging can be moreeasily used with image comparison and processing algorithms forcomputerized object comparison, defect detection, and classification.

Dark field imaging has been successfully used to detect irregularitieson object surfaces. The advantage of dark field imaging is that flatspecular areas scatter very little light toward the detector, resultingin a dark image. Any surface features or objects protruding above theobject scatter light toward the detector. Thus, in inspecting objectslike semiconductor wafers, dark field imaging produces an image offeatures, particles, or other irregularities on a dark background.

One advantage of dark field imaging is that it provides a large signalfor small features that scatter light. This large signal allows darkfield imaging to detect smaller object features and provide fasterobject inspections than bright field imaging. Another advantage is thatFourier filtering can be used to minimize repeating pattern signals andenhance the defect signal-to-noise ratio.

Many dark field imaging techniques have been developed to enhance thedetection of different types of defects. These techniques consist of aspecific illumination scheme and collection scheme such that thescattered and diffracted light collected from the object provides thebest signal. Several optical systems have been developed that usedifferent dark field imaging techniques including laser directional darkfield, double dark field, central dark ground, and ring dark field.

When employing either bright field or dark field imaging it is oftendesirable to use short wavelength illumination in the 300-400 nmultraviolet (UV) range, 200-300 nm deep ultraviolet (deep UV or DUV)range, or 100-200 vacuum ultraviolet (vacuum UV or VUV) range. Forbright field imaging short wavelength illumination provides improvedresolution allowing the detection of smaller object features. For darkfield imaging short wavelength illumination provides greatly increasedscattering signals that allow the detection of smaller objects, anincrease in inspection speed, or a decrease in the illumination powerrequirements. In addition, both bright field and dark field imaging cantake advantage of changes in material absorption and reflectivities atshort wavelengths. The changes in absorption and reflectivity ofdifferent materials at short wavelengths can help to identify thesedifferent materials. Also, many materials have greatly increasedabsorption at wavelengths in the DUV and VUV. Increased absorption canhelp improve optical inspection of upper surfaces, such as insemiconductor wafer inspection, by minimizing reflections interferencefrom underlying layers.

Optical systems supporting bright field and dark field imaging typicallyrequire correction over some finite spectral bandwidth or wavelengthrange. Correction is necessary because different wavelengths havedifferent glass indexes, known as dispersion. Conventional designsusually use two or three glass types to compensate for dispersiveeffects. Compensating for these dispersive effects is called colorcorrection. Color correction in the UV, DUV, and VUV wavelength rangesis increasingly difficult. At shorter wavelengths, the glass dispersiongreatly increases and is difficult to correct. In addition, at shorterwavelengths fewer and fewer glass materials may be used for correction.

At wavelengths shorter than 365 nm there are very few glass materialshaving high transmission. These materials typically include silica,CaF₂, MgF₂, and LiF₂. Of these materials, silica is most desirable touse in high end optical systems. Silica is a hard glass with low thermalexpansion, no birefringence, high UV damage threshold, and is notsensitive to humidity. CaF₂, MgF₂, and LiF₂ are soft glasses which aredifficult to polish, have high thermal expansion, some birefringence,and can be sensitive to humidity. Of these fluoride glasses, CaF₂ is themost desirable to use as an optical glass.

Minimizing the number of glass materials used in a UV, DUV or VUVoptical system produces special challenges for correcting coloraberrations. This is especially true in the VUV wavelength range whereboth silica and CaF₂ are extremely dispersive. Even a narrow spectralbandwidth at very short wavelengths can require the correction ofnumerous distinct color aberrations. Some important color aberrationsthat need to be corrected may include primary and secondary axial color,primary and secondary lateral color, chromatic variation of sphericalaberration, and chromatic variation of coma.

At a wavelength of 157 nm, for example, CaF₂ is the only reasonableglass material that has high transmission and does not have severeproblems with birefringence, water solubility, or mechanical softness.Standard color correction is not possible because no other glassmaterial is available.

Another problem with currently available systems is that such systemsprovide a relatively short working distance between the optical systemand the surface being inspected. Photomask inspection requires theworking distance of the imaging system to be greater than approximately6 millimeters due to the protective pellicle present on the photomask. Along working distance is also desirable in laser dark-field inspectionenvironments. An imaging system having a long working distance makes itpossible to directly illuminate the surface being inspected from outsidethe objective. Under typical circumstances, a working distance greaterthan 4 millimeters presents generally desirable attributes, while aworking distance greater than 8 millimeters is preferred.

Further, a high numerical aperture (NA) provides advantages for highresolution imaging and collecting as large a solid angle as possible. Itis highly desirable to achieve numerical apertures of 0.8, whichcorresponds to collecting angles above the surface from normal to 53degrees.

A further problem with currently available systems is that while somerelatively high NA systems exist, the central returning rays may beobscured due to apertures and other optical components. Such a centralobscuration blocks low frequency information from the image and isundesirable.

Additionally, some presently available systems include internal pupilplanes. A system having an internal pupil plane is undesirable becauseit does not readily support aperturing, particularly variations inaperture shapes, and Fourier filtering.

Finally, some currently available systems have limited field sizes. Alarge field size is often important for area imaging and to allow highspeed inspection such as for semiconductor wafers and photomasks. Fieldsize is typically limited by aberrations such as lateral color andchromatic variation of aberrations. Aberration correction is especiallydifficult if combined with chromatic correction for a large spectralbandwidth, high NA, long working distances, no central obscuration, andan external pupil plane.

Two prior patents describe high NA catadioptric systems that can supportthis type of imaging. These patents are U.S. Pat. No. 5,717,518 toShafer et al. and U.S. patent application Ser. No. 09/046,814 to Chuanget al, now U.S. Pat. No. 6,064,517, both assigned to KLA-TencorCorporation and hereby fully incorporated by reference.

U.S. Pat. No. 5,717,518 describes an apparatus capable of high NA, ultrabroad-band UV imaging. The '518 patent presents a 0.9 NA system forbroad-band bright field and multiple wavelength dark-field imaging. The'518 system has a high degree of chromatic correction using a singleglass material. Further correction is possible using two glassmaterials. The '518 system employs an achromatized field lens group tocorrect for secondary and higher order lateral color. This design hasseveral limitations, including a limited working distance, centralobscuration, internal pupil, and relatively tight manufacturingtolerances. The primary method for laser dark-field illumination in thisscheme is to direct a laser through a hole or aperture in the sphericalmirror element. This type of illumination can be quite complicated toimplement.

U.S. patent application Ser. No. 09/046,814, now U.S. Pat. No. 6,064,517discloses an apparatus capable of combining ultra high NA, narrow-bandUV imaging and multiple laser dark-field imaging techniques into asingle optical system. The design is single wavelength and operates atnumerical apertures up to 0.99. The [′814 application] ′517 patent isideally suited for use in laser dark-field inspection, but has severallimitations, including a relatively narrow working distance, a centralobscuration, a narrow bandwidth, and relatively tight manufacturingtolerances. The system of the [′814 application] ′517 patent uses asimilar technique to that shown in the ′ 518 patent for laser dark-fieldillumination and generally has similar advantages and limitations.

Other specialized catadioptric optical systems have been developed foruse in semiconductor lithography. These systems are designed to image aphotomask at a reduced magnification onto a resist coated wafer. Twoprior patents describe high NA catadioptric systems that can supportthis type of imaging, specifically U.S. Pat. No. 5,052,763 to Singh etal. and European Patent Application number EP 0 736 789 A2 to Takahashi.

The '763 patent describes a catadioptric optical system capable of highNA imaging. This optical system is designed to create a substantiallyflat image field over the large areas required for semiconductorlithography. The design utilizes an input optical system having a curvedfield, a catadioptric relay system, and an output optical system tocorrect for the field curvature and some monochromatic aberrations.Limitations for the '763 design include a limited working distance, aninternal pupil, a narrow bandwidth, an internal beamsplitter, and tightmanufacturing tolerances.

The Takahashi European Patent Application presents a catadioptricoptical system capable of high NA imaging. This optical system isdesigned to reduce the required diameter of the catadioptric mirrorelement for long distances to the wafer. The Takahashi design has aninternal pupil, a narrow bandwidth using multiple glass materials, andtight manufacturing tolerances.

It is therefore desirable to provide a system for performing both brightfield and dark field surface inspection having an objective whichcorrects image aberrations, chromatic variation of image aberrations,and longitudinal (axial) color and lateral color, including residual(secondary and higher order) lateral color correction over a broadspectral range. Such a system should be relatively inexpensive and easyto operate in typical environments, provide a relatively long workingdistance, large filed size, and have lenient tolerances. It ispreferable to have such a system which operates at UV, DUV, or VUVwavelengths, a high numerical aperture, without central obscuration, andwith an accessible pupil plane.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a system that isideally suited to support both broad-band bright-field and laser darkfield imaging and inspection.

It is another object of the present invention to provide a system havinga high degree of chromatic correction using a minimum number of glasstypes, and even a single glass type.

It is a further object of the present invention to provide an apparatusthat has a relatively long working distance between the optical systemand the surface being inspected, a high numerical aperture, and nocentral obscuration. Such a system should have a working distance atleast greater than 2 millimeters and preferably greater than 6millimeters with supporting numerical apertures as high as possible.

It is yet another object of the present invention to provide aninspection system having an external pupil plane to support aperturingand Fourier filtering.

It is still another object of the present invention to provide a systemhaving relatively loose tolerances and which can be manufactured at arelatively reasonable cost.

These and other objects of the present invention are achieved byproperly configuring the separate components of a catadioptric imagingsystem to interact with light in a precise and predetermined manner. Thepresent invention is a catadioptric imaging method and apparatus foroptical imaging and inspection. The design approach disclosed herein isideally suited for both bright field and dark field imaging andinspection at wavelengths at or below 365 nm. In many instances, thelenses used in the system disclosed herein may be fashioned orfabricated using a single material, such as calcium fluoride or fusedsilica.

The first embodiment uses the catadioptric optical system as anapparatus for photomask inspection. This embodiment consists ofillumination optics such as transmission illumination optics orreflected illumination optics, a long working distance catadioptricimaging objective, image forming optics, and a detector.

The second embodiment uses this optical system as an apparatus for laserdark field inspection. This apparatus consists of illumination optics,such as a laser illumination element, a long working distancecatadioptric imaging objective, a Fourier filter or aperture at theexternal pupil plane, image forming optics, and a detector.

Several additional embodiments describe the optical apparatus in thefollowing detailed description. Two basic catadioptric objective designapproaches are employed in these embodiments. Both approaches takeadvantage of multiple internal images for aberration correction and toproduce a design with no central obscuration. The first design approachuses a reflective lens mirror element that is folded such that theoptical axis is at an angle to the optical axis of the major refractivecomponents. The second design approach uses a reflective lens mirrorelement that has its optical axis mostly coincident with the opticalaxis of the major refractive components. Each of these design approachescan correct for at least 1 nm of spectral bandwidth at 193 nm using asingle glass material. The design can also correct for 0.5 nm ofspectral bandwidth at 157 nm. Addition of a second glass materialprovides the ability to increase spectral bandwidth. For example, at 193nm, the spectral bandwidth can be increased to greater than 10 nm usingsilica and CaF₂ glass.

The second design approach has the optical axis of a Mangin mirrorcoincident or nearly coincident with the optical axis of the refractivecomponents. This design provides relatively relaxed manufacturingtolerances and increased design flexibility.

The image forming optics highly important in both the first and secondembodiments. Two possible design options are presented for the imageforming optics. These two options are a dual motion varifocal zoom and asingle motion optically compensated zoom. Both zoom options provide arange of magnifications that would be useful in the first or secondembodiments. Both of these zoom options can provide high quality imageswhen combined with the catadioptric objective approaches describedherein.

Several additional advantages are achieved with the current invention.First, the designs can be implemented using a single glass type for eachof the lenses, thereby facilitating production of an imaging systemwhich utilizes the single best refractive material for broad band UV,DUV, or VUV applications.

Other significant advantages of the current invention include theability to correct for primary, secondary, and higher order chromaticvariations in focus, as well as correction for primary, secondary, andhigher order lateral color, and corrections made for the chromaticvariations of aberrations such as spherical, coma, and astigmatism.

An additional advantage of the current invention is the excellentperformance with a broad bandwidth, long working distance, high NA, anda large flat field.

There has been outlined rather broadly the more important features ofthe invention in order that the detailed description thereof thatfollows may be better understood, and in order that the presentcontribution in the art may be better appreciated. These and otherobjects and advantages of the present invention will become apparent tothose skilled in the art from the following detailed description of theinvention and the accompanying drawings. Those skilled in the art willappreciate that the conception on which this disclosure is based mayreadily be utilized as the basis for the designing of other arrangementsfor carrying out the several purposes of the invention. It is importanttherefore that this disclosure be regarded as including such equivalentarrangements as do not depart from the spirit and scope of theinvention.

DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a method of optical imaging and bright field and ringdark field inspection at wavelengths at or below 365 nm;

FIG. 2 illustrates a method of optical imaging and inspection usinglaser dark-field at wavelengths at or below 385 nm;

FIG. 3 is an example folded 0.7 NA catadioptric objective utilizing asingle glass material;

FIG. 4 illustrates the effect of the lateral separation between raystransmitted to and received from the Mangin mirror;

FIG. 5 presents an embodiment of the design that provides narrow bandaberration correction to give a 0.7 NA, long working distance,unobscured design using only fused silica;

FIG. 6 presents an embodiment of the invention having a folded 0.7 NAcatadioptric objective using silica and calcium fluoride to furtherincrease system bandwidth;

FIG. 7 presents an embodiment of the invention having an in-line orstraight 0.7 NA catadioptric objective employing a single glassmaterial;

FIG. 8 presents an embodiment of the invention optimized for awavelength of 157 nm wherein the lenses shown are fashioned from calciumfluoride;

FIG. 9 presents an embodiment of the invention using two glass materialsto increase the correction bandwidth from 193 to 203 nm;

FIG. 10 presents an embodiment of the image forming optics using avarifocal two motion zoom;

FIG. 11 presents three different magnifications possible with thevarifocal zoom;

FIG. 12 presents an embodiment of the image forming optics using asingle motion optically compensated zoom; and

FIG. 13 presents three different magnifications possible with theoptically compensated zoom.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 illustrates a first embodiment of the current invention,including a method of bright field or ring dark field inspection. Thismethod is particularly suited for photomask or wafer inspection, andconsists of illumination optics such as transmission illumination source101 or reflected illumination source 105, a long working distancecatadioptric imaging objective 102, image forming optics 103, and adetector 104. For wafer inspection, only reflected light illumination isrequired. The design of the long working distance catadioptric objectiveand the image forming optics are enabling technologies for photomaskinspection at wavelengths at or below 365 nm. Optical designs thatsupport this photomask inspection method using a single material and twomaterials will be disclosed in embodiments 3-10. The optics and detectorare all carefully designed and optimized for the wavelength and spectralbandwidth of the illumination, as will be detailed below.

Different illumination sources may be employed in this design andincorporated in the transmitted light illumination 101 and reflectedlight illumination 105 and with the designs of embodiments 3-10 and withrespect to FIGS. 3-13. These light sources include but are not limitedto lasers and lamps. Many different lasers are available at wavelenghtsat or below 365 nm including argon (364, 351, 333, 275 nm), frequencyconverted lasers (351 nm, 266 nm, 213 nm), helium cadmium (325 nm),xenon chloride excimer (308 nm), krypton fluoride excimer (248 nm),argon fluoride excimer (193 nm), fluorine (157 nm), and argon excimer(126 nm). In addition, different wavelength lasers are possible usingfrequency mixing techniques. Many different lamp sources are availableincluding mercury xenon (365-220 nm), cadmium. lamp (210-220 nm)deturium (150-190 nm), as well as various excimer lamps. These sourcescan have very different spectral bandwidths. For example, an unnarrowedexcimer laser, a lamp having a bandpass filter, or a frequency convertedlaser can each produce light having a 1 nm bandwidth or less. Anunfiltered lamp or lamp with a larger bandpass filter, such as an arclamp, excimer lamp, or a deuterium lamp, are also possible sourceshaving bandwidth greater than 1 nm. Relatively few light sources areavailable at 193 nm and 157 nm wavelengths. Of these light sources,excimer lasers have the brightness required to support high speedphotomask inspection.

The illumination used in the embodiment illustrated in FIG. 1 can beeither transmitted light, shown as transmitted illumination source 101,reflected light, shown as reflected illumination source 105, or both.The illumination may also be in the form of a ring such as required forring dark field imaging. For example, this ring illumination can beobtained by placing a ring shaped aperture at or near a pupil planelocated in the illumination system. This aperture blocks smallillumination angles near the optical axis of the pupil and allow higherillumination angles away from the optical axis of the pupil. This ringshould preferably be matched to a similar ring in the catadioptricobjective or image forming optics such that all the rays from theillumination ring are blocked in the image.

Note that in the case of the reflected illumination source that thesystem employs beamsplitter/reflector 106. In the case of transmittedillumination using transmitted illumination source 101, photomask 107 isdisposed between transmitted illumination source 101 and objective 102.

The illumination system for transmitted light preferably employs acondenser objective. The purpose of the condenser objective is toilluminate a region nominally the same size as the imaging region on awafer or photomask. As the condenser objective is used only forillumination, it does not require high optical quality. Such anobjective can be a reduced performance version of the catadioptricobjectives presented in this invention or a simple all refractivedesign. Such designs are achievable by those skilled in the art whenpresented with this disclosure. The illumination for reflected lightuses a beamsplitter and is implemented as in a standard microscope.

The long working distance imaging objective 102 includes the lensingarrangements described in embodiments 3 through 8 and illustrated inFIGS. 3-13. For photomask inspection, these designs should fulfillcertain basic requirements. The objective working distance should begreater than 6 mm so as not to interfer with a pellicle that protectsthe recticle. The objective should also preferably be well corrected foraberrations over the bandwidth of the illumination source. Many of theavailable illumination sources have a bandwidth greater than the 1-2 nmbandwidth obtained from a standard type of single material allrefractive objective design. An example of this is an unnarowwed excimerlaser that typically has a spectral bandwidth around 1 nm. Thecatadioptric designs in embodiments 3-8 address this problem.

The objective should also have the ability to image over a relativelylarge field. Large fields and high data acquisition rates are essentialto make inspecting the photomask as fast as possible.

The image forming optics 103 are corrected over the spectral bandwidthof the illumination source and the catadioptric imaging objective. Theimage forming optics 103 are also capable of various magnificationsrequired in a photomask inspection environment. The image forming optics103 and the catadioptric objective 102 may each and together be fullycorrected for aberrations. Such aberration correction permits testingthe image forming optics 103 and the catadioptric objective 102 asseparate units. Alternately, aberration correction may be shared betweenthe catadioptric objective 102 and the image forming optics 103. Ingeneral the optical design for shared aberration correction can besimpler to fabricate, but testing of the image forming optics and thecatadioptric objective can be more complex.

The image forming optics or catadioptric objective can alternatelycontain a ring aperture at or near a pupil plane such as required forring dark field imaging. This aperture should block all directillumination light from reaching the detector, corresponding to asimilar aperture in the illumination. Thus the illumination aperturewould be a transmissive ring and the imaging aperture would be acorresponding opaque ring.

Combinations of bright field imaging and ring dark field imaging arealso possible. Bright field and dark field may be combined on separatedetectors or on the same detector at the same times or in an alternatefashion, as is generally known in, the art. When bright field and darkfield imaging is performed on the same detector at the same time, therelative intensity and phase of the light energy can be modified bysuitable apertures in the illumination and imaging.

The detector 104 is preferably a high speed detector capable of the highdata rates used for inspection systems. Detector 104 can be a singlepoint diode type detector or an area type detector such as a CCD or aCCD operating in the Time Delay and Integration (TDI) mode. Ideally,this detector should have a high quantum efficiency, low noise, and agood Modulation Transfer Function (MTF). Back thinned CCD sensors areparticularly well suited for this purpose.

The second embodiment is a method for laser dark-field inspection at orbelow 365 nm, and is illustrated in FIG. 2. The embodiment illustratedin FIG. 2 is especially suited for wafer and photomask inspection. Theapparatus of FIG. 2 consists of illumination optics, such as laserillumination element 201, a long working distance catadioptric imagingobjective 202, a Fourier filter or aperture 203 at the external pupilplane, image forming optics 204, and a detector 205. Catadioptricimaging designs using a single material in the configuration of FIG. 2preferably use an illumination source having a 1 nm or less bandwidth.Catadioptric imaging designs using two glass materials are achievablewhen using an illumination source with greater than 1 nm bandwidth.

The types of illumination that can be used for this system are similarto those used in the first embodiment for bright field and ring darkfield inspection. The preferred energy or light source is a laser due toits directionality and brightness. One method or apparatus forlaser-dark field illumination of a semiconductor specimen is directillumination of the specimen from outside the objective. In such anarrangement, only light scattered from the specimen is collected by thecatadioptric objective. The specularly reflected beam is beyond thenumerical aperture of the objective and is not collected.

Again, the long working distance imaging objective 202 is described inembodiments 3 through 8 and with respect to FIGS. 3-13. For laser darkfield inspection, these designs fulfill certain basic requirements. Thelong working distance offered by the designs of FIGS. 3-13 simplifiesdelivering laser energy to the wafer in the semiconductor specimenenvironment from outside the objective without interfering with theoperation of the imaging system. The objective is preferably also wellcorrected for aberrations over the bandwidth of the illumination source201. Many of the available illumination sources have a bandwidth that isgreater than the 1-2 nm bandwidth obtained from a standard type ofsingle material all refractive objective design. An example of this isan unnarowwed excimer laser that typically has a spectral bandwidtharound 1 nm. The catadioptric designs in embodiments 3-8 address thisproblem. The objective 202 images over a large field, as large fieldsand high data acquisition rates provide for rapid wafer or photomaskinspection.

The objective also preferably has an easily accessible pupil plane tosupport Fourier filtering or aperturing, such as by the Fourier filteror aperture 203. Fourier filtering can reduce the noise caused byrepeating patterns on the wafer, thereby permitting smaller randomdefects to be more readily detected.

The image forming optics 204 are preferably corrected over the spectralbandwidth of the illumination and the catadioptric imaging objective202. The image forming optics also preferably support the variousmagnifications required by a dark field inspection system. Oneimplementation of the image forming optics 204 is to have them and thecatadioptric objective 202 each fully corrected for aberrations. Such asystem allows simplified testing of image forming optics 204 and thecatadioptric objective 202 as separate units. An alternate technique issharing aberration correction between the catadioptric objective 202 andthe image forming optics 204. Such an approach can be mechanically oroptically simpler, but can complicate image forming optics andcatadioptric objective testing.

Again, as in the first embodiment shown in FIG. 1, the detector 205 ofFIG. 2 is preferably a high speed detector capable of the high datarates used for an inspection system. Detector 905 can be a single pointdiode type detector or an area type detector such as a CCD or a CCDoperating in the TDI mode. Ideally, this detector should have a highquantum efficiency, low noise, and a good MTF. Such detectors aregenerally known to by those skilled in the art.

The design of FIGS. 1 and 2 can support bright field, laser directionaldark field, ring dark field, and simultaneous bright-field anddark-field schemes, where each of these schemes can be achieved in thepresence of UV, DUV, and VUV wavelengths. The opaqueness of CMP layersin the deep UV and VUV ranges makes a system using this objectiveideally suited to finding surface defects and microscratches onsemiconductor wafers.

The catadioptric optical apparatus presented to support bright field anddark field imaging and inspection are also ideal for use in a variety ofother applications. The design can be easily optimized by someoneskilled in the art for wavelengths from the visible range to the deep UVrange and to the vacuum UV range. Longer wavelengths can be optimizedfor larger bandwidths because the glass dispersion is less. For example,bandwidths of greater than 140 nm are possible with a two materialdesign and a center wavelength of 300 nm. The light energy can includeshorter wavelengths and the design permits use of multiple wavelengths.For semiconductor inspection, the designs presented can support brightfield, laser directional dark field, ring dark field, and simultaneousbright-field and dark-field schemes. The optical designs presented arealso ideally suited for use as a lithography lens or for lithographysimulation, a research tool for micro-electronic development,florescence measurements, or in biology where a long working distance isrequired for sample clearance. Due to the ability of this objective toprovide applications in the presence of extremely varied lightwavelengths and spectral bandwidths, the designs in FIGS. 1 and 2 arewell suited for florescence measurements.

FIG. 3 illustrates a third embodiment of the present invention. Thisthird embodiment is simple example of a folded 0.7 NA catadioptricobjective 300 utilizing a single glass material, provided herein toexplain the aberration correction and objective functionality. As withthe other figures discussed herein, FIG. 3 includes a line in the upperleft corner indicating a reference measurement of the size, inmillimeters, of the associated line.

Also, as in other figures discussed herein, light is shown entering fromthe left side of FIG. 3 from an energy source (not shown).

The energy from the energy source is focused by a group of positive andnegative lenses 301 arranged in either a telephoto or inverse telephotoconfiguration. The positive lens may be either in the front or in theback of the arrangement, where front and back are relative terms withrespect to the energy source. Here negative lens 302 is in front ofpositive lens 303, where negative lens 302 and positive lens 303 formthe group of positive and negative lenses 301. A positive field lens 304is located somewhat in front of the focus for lens group 301. Very closeto the small image formed is located a relatively small pair of flatfold mirrors 305 a and 305 b arranged in a V-shape. The first small flatmirror 305 a reflects the light at 90 degrees to the optical axis. Someother angular amount may be used depending on the application desiredwhile still within the scope of the present invention.

The diverging light then proceeds to the Mangin mirror 306 located atthe bottom of FIG. 3. A Mangin mirror is a lens/mirror element that isrefractive and has a reflective back surface. The Mangin mirror 306re-images the first image onto the second small flat folding mirror 305b, at substantially unit magnification. The system is implemented farenough off axis such that the returning second image is displacedlaterally enough from the first image at point 309 so that the lateralseparation permits optical manipulation of each separate image. Theamount of lateral separation allows the second small flat mirror 305 bto fold the light path back onto the original optical axis. This effectis illustrated in FIG. 4.

According to FIG. 4, the input rays in the field of the substantiallyunit magnification Mangin mirror relay are on one side of the field andthe output rays are on the opposite side. From FIG. 3, the second smallfold mirror 305 b is followed by a second field lens 307. From there thelight proceeds up to the final focusing lenses 308 discussed below. Thisfinal focusing lens group 308 provides a relatively long workingdistance to the surface of the specimen, such as the photomask orsemiconductor wafer.

If the two field lenses were not present in the design of FIG. 3, thisdesign would constitute an application of the Schupmann type designusing a Mangin mirror. The Mangin mirror would provide the means bywhich the virtual image of the Schupmann system would be turned into areal image, just as shown in previously known systems. This newconfiguration provides two significant advantages over the previousdesigns: lack of obscuration and a relatively long working distance.Both advantages result from the novel arrangement of the small foldmirrors 305, the substantially unit magnification Mangin mirror 306, andthe presence of the two intermediate images in the system.

The small fold mirrors 305 can be implemented in a variety of ways.Objective designs can be optimized where these fold mirrors are on thesides of the field lenses opposite to the internal images. Objectivedesigns can also be optimized where the small fold mirrors are on theside of the internal image closest to the Mangin mirror. Also, a prismor prisms can be used for the reflective surfaces. A reflective coatingcan be added to one or more of the prism surfaces, such that the twoprisms can be used as reflective mirrors. Alternately, one prism canhave two surfaces coated and serve as both reflective surfaces. This isadvantageous because a highly accurate angle can be polished on theprism to define the angle of the optical axis. The prisms can also beused in total internal reflection mode. This is advantageous when highefficiency optical coatings are difficult, such as for short wavelengthsor broad spectral bandwidths. In this mode, the hypotenuse of a near 90degree prism is used in total internal reflection, replacing areflecting surface. The surfaces of the prism that are near normal tothe incoming and reflecting beams may be anti-reflection coated toimprove transmission efficiency.

Addition of one field lens to the system, in either of the two locationswhere the design has its two field lenses, provides the ability tocorrect the design for either secondary axial color or primary lateralcolor. Primary axial color is corrected without field lenses bybalancing the positive refractive power of the Mangin mirror element 306with the positive power of the lenses, as in connection with theSchumpmann principle. Use of two field lenses 304 and 307 near theintermediate images provides for correction of both secondary axialcolor and primary lateral color. The result is a design with a fairlybroad spectral range having good axial color correction, but one that islimited by secondary axial color. Correction of the secondary lateralcolor can be accomplished by balancing the secondary color between thefirst half of the system with the second half of the system, where thefirst half of the system includes all lenses from the incoming energysource up to the reflective portion of the Mangin mirror 306, includinglens group 301, field lens 304, first small fold mirror 305 a, andMangin mirror 306. This secondary lateral color balancing scheme workswell due to the two intermediate images produced as in FIG. 4 and thetwo separate field lenses 304 and 307 present in the system. As in knownsystems, tertiary axial color is improved by moving the field lenses 304and 307 a significant distance to one side of the intermediate images.

The present invention presented is a catadioptric system requiring asingle refractive material, in conjunction with the particularlydescribed arrangement of mirrors, to correct for chromatic aberrations.For a design intended for use in the presence of an energy sourcewavelength near 193 nm, the preferred lens material is silica. For asimilar design intended for use in wavelengths near 157 nm, thepreferred lens material is CaF₂. At 157 nm wavelength, for example, CaF₂is preferred since it does not have severe problems with birefringence,water solubility, or mechanical softness. Further chromatic correctioncan also be achieved using two glass materials, but such an arrangementmay require additional cost or present birefringence, water solubility,or mechanical softness drawbacks.

Special challenges are presented when correcting various coloraberrations when only one glass type is used. Conventional designsusually use two or three glass types to correct color aberrations. Thepresent invention performs the correction in the presence of a singlematerial type used in all lenses due to the specific lens and mirrorconfiguration. In very deep UV, both silica and CaF₂ are highlydispersive, so even a narrow spectral bandwidth at very shortwavelengths can require the correction of quite a few distinct coloraberrations. Such color aberrations may include primary and secondaryaxial color, primary and secondary lateral color, chromatic variation ofspherical aberration, and chromatic variation of coma. In the presentinvention, lens and mirror positioning permits primary axial and lateralcolor to be completely corrected. Secondary axial and lateral colorcannot be completely corrected, but can be kept small enough to beacceptable over a relatively narrow spectral bandwidth. Chromaticvariation of both spherical aberration and coma can also be correctedusing this small fold mirror and dual field lens design. The physicalseparation between positive and negative axial color contributionspresent in the design of FIG. 3, particularly the separation topositionally disparate locations within the design, leads to specialproblems in correcting the chromatic variation of aberrations.Minimization of chromatic aberration variations requires a veryparticular arrangement of lens powers and shapes such as illustrated inFIG. 3 and later in embodiments 4-8.

The design of FIG. 3 provides an optical system having a long workingdistance between the optical system and the surface being inspected,particularly between the final lens in the system 308 and the surface ofthe object or specimen (not shown) being imaged. The arrangement of FIG.3 further provides a high numerical aperture and no central obscuration.A high numerical aperture provides for high resolution imaging andcollecting as large an angular range above the surface being imaged aspossible. Numerical apertures of greater than 0.8 can be achieved withexcellent performance. A numerical aperture of 0.8 corresponds tocollecting angles above the surface from normal to 53 degrees.

Further, unlike many catadioptric optical systems, the design of FIG. 3has no central obscuration to block low frequency information. The FIG.3 design does not have this problem and permits utilization of all lowfrequency information.

The design illustrated in FIG. 3 also provides relatively reasonabletolerances which can be more easily manufactured. The benefit ofreasonable tolerances in the design of FIG. 3 is that it overcomesproblems present in many known high NA, broad bandwidth systems havingsome optical elements with very tight position and thickness tolerances.These tight tolerances may make previous designs either too expensive orin some cases impossible to build and operate in a productionenvironment.

FIG. 5 shows a more complex version of the design that providesadditional narrow band aberration correction to give a 0.7 NA, longworking distance, unobscured design using only fused silica. The objectextends from 0.25 mm to 0.75 mm off axis and the design has a bandwidthof 1 nm from 192.8-193.8 nm. The surface data for an example of thistype of design is listed in Table 1. Performance for the system shown inFIG. 5 is limited by chromatic variation in aberrations rather thanhigher order axial color. Other versions are possible and would requireminimal effort by those of ordinary skill when presented with thisdisclosure.

As illustrated in FIG. 5, energy, such as laser energy, is transmittedfrom energy source (not shown) and into objective 500. Objective 500includes lens arrangement 530, which includes a first lens pair 531including first lens 501 and second lens 502, followed by third lens503, fourth lens 504, and fifth lens 505. Energy is focused by lensarrangement 530 toward field lens 506, which then directs energy towardthe small folding mirror or reflecting surface, here specifically firstmirror 507. Energy is directed from first mirror 507 toward lens 508 andto Mangin mirror 509, which reflects light energy back through lens 508and toward the second part of the small folding mirror or reflectingsurface, specifically to second mirror 510. As shown in FIG. 5, firstmirror 507 and second mirror 510 are substantially planar, and the twoform multiple planar reflecting surfaces, and as shown in FIG. 5 theangle between first mirror 507 and second mirror 510 is on the order of90 degrees. As also shown in FIG. 5, no internal beamsplifters, i.e.beamsplitters within the objective, are provided.

In FIG. 5, light is reflected from second folding mirror 510 to fieldlens 533, which includes first field lens 511 and second field lens 512.From the field lens 533, light is transmitted to focusing lensarrangement 534, which includes first focusing lens 513, second focusinglens 514, third focusing lens 515, fourth focusing lens 516, fifthfocusing lens 517, sixth focusing lens 518, and seventh focusing lens519. The specimen or surface to be examined is not shown in FIG. 5, butis located to the right of the objective 500 in the orientation of FIG.5. Light energy strikes the specimen and reflects back through theobjective 500 of FIG. 5. Alternately, light energy can transmit throughthe specimen and then through the objective 500 from right to left asshown in FIG. 5.

TABLE 1 Surface data for the folded design of FIG. 5 operating at 193 nmwavelength with a 1 nm bandwidth Element Surf Radius Thickness* MaterialNumber OBJ Infinity Infinity  N/S** STO Infinity −32.038 N/S  2 81.9835.000 Silica 501  3 18.305 4.216 501  4 −27.049 5.000 Silica 502  5−61.738 33.261 502  6 1276.054 7.000 Silica 503  7 −83.831 0.500 503  879.482 8.000 Silica 504  9 −229.250 1.000 504 10 47.191 7.000 Silica 50511 138.080 66.471 505 12 14.544 4.000 Silica 506 13 514.189 7.697 506 14Infinity 0.000 Mirror 507 15 Infinity −77.947 507 16 50.786 −8.000Silica 508 17 139.802 −22.299 508 18 32.934 −8.000 Silica 509 19 60.7748.000 Mirror 509 20 32.934 22.299 509 21 139.802 8.000 Silica 508 2250.786 77.947 508 23 Infinity 0.000 Mirror 510 24 Infinity −3.500 510 25Infinity −2.500 510 26 −50.929 −5.724 Silica 511 27 −41.159 −1.814 51128 302.166 −6.000 Silica 512 29 24.557 −48.713 512 30 544.674 −6.500Silica 513 31 89.379 −30.822 513 32 −90.727 −12.569 Silica 514 33−64.505 −6.000 514 34 −233.637 −8.000 Silica 515 35 83.534 −0.500 515 36−92.578 −5.679 Silica 516 37 1208.052 −0.500 516 38 −50.386 −5.8316Silica 517 39 −146.956 −0.500 517 40 −30.274 −5.971 Silica 518 41−56.351 −0.500 518 42 −12.744 −7.155 Silica 519 43 −12.195 −14.453 51944 Infinity 1.68E−05 N/S IMA Infinity N/S *Surface thickness representsthe thickness of a surface when at the “upstream” side of the element ordistance between the surface and the next surface if at the “downstream”side of the element. For example, surface 2 on element 501 has a radiusof 81.983 millimeters and the lens is 5.000 millimeters thick. Surface 3of lens element 501 has a radius of 18.305 millimeters and is 4.216millimeters from the next surface, which is surface 4 on element 502.**Certain elements relating to but not critical to the design are notshown in the figures.

The abbreviation OBJ as used herein and commonly understood represents“Object,” while the abbreviation STO represents Stop, or as commonlyunderstood, the aperture stop for the design. IMA is understood torepresent the Image plane or position.

A fourth embodiment of the invention is presented in FIG. 6. FIG. 6illustrates a folded 0.7 NA catadioptric objective using two materials.This design uses silica and calcium fluoride to further increase systembandwidth. Calcium fluoride is added to the field lenses in this designmake both such lenses achromats. The design of FIG. 6 is corrected forlight energy from 193 to 225 nm. Surface data for a system of the fourthembodiment is presented in Table 2.

As shown in FIG. 6, light energy or laser energy is transmitted fromenergy source (not shown) and into objective 600. Objective 600 includesa lens arrangement 630, which includes first lens 601, second lens 602,third lens 603, fourth lens 604, fifth lens 605, and sixth lens 606.Energy is focused by lens arrangement 630 toward field lens arrangement631, which includes seventh lens 607, eighth lens 608, ninth lens 609,and tenth lens 610. Eighth lens 608 and tenth lens 610 are formed ofcalcium fluoride (CaF₂). This field lens arrangement 631 directs lightenergy to first small folding mirror or reflecting surface 611, whichdirects energy toward lens 612 and to Mangin mirror 613. Light energyreflects back from Mangin mirror 613 back through lens 612 and towardthe second part of the small folding mirror or reflecting surface,specifically to second mirror 614.

Light is reflected from second folding mirror 614 to second field lensarrangement 632, which includes first field lens 615, second field lens616, and third field lens 617. Both first field lens 615 and third fieldlens 617 are formed of calcium fluoride. From the field lens arrangement632, light energy is transmitted to focusing lens arrangement 633, whichincludes first focusing lens 618, second focusing lens 619, thirdfocusing lens 620, fourth focusing lens 621, fifth focusing lens 622,and sixth focusing lens 623. The specimen or surface to be examined isnot shown in FIG. 6, but is located to the right of the objective 600 inthe orientation of FIG. 6.

TABLE 2 Surface data for a folded design at 193 nm with a 32 nmbandwidth Element Surf Radius Thickness Material Number OBJ InfinityInfinity N/S STO Infinity −32.204 N/S  2 −101.014 3.000 Silica 601  325.381 74.761 601  4 −29.809 5.000 Silica 602  5 −31.309 1.000 602  6183.355 7.500 Silica 603  7 −109.361 0.500 603  8 99.287 7.000 Silica604  9 −250.439 1.000 604 10 50.010 5.500 Silica 605 11 118.693 3.882605 12 −216.754 4.000 Silica 606 13 127.307 44.956 606 14 28.389 24.000Silica 607 15 7.676 0.683 607 16 12.387 3.000 CaF₂ 608 17 −10.095 0.475608 18 −8.982 5.497 Silica 609 19 8.000 0.093 609 20 8.069 3.000 CaF₂610 21 −9.002 5.673 610 22 Infinity 0.000 Mirror 611 23 Infinity −94.049611 24 60.160 −8.000 Silica 612 25 158.201 −20.471 612 26 34.636 −8.000Silica 613 27 65.450 8.000 Mirror 613 28 34.636 20.471 613 29 158.2018.000 Silica 612 30 60.160 94.049 612 31 Infinity 0.000 Mirror 613 32Infinity −3.500 613 33 Infinity −2.500 613 34 −26.228 −2.500 CaF₂ 614 3512.608 −0.102 614 36 12.417 −9.995 Silica 615 37 −34.270 −2.110 615 3870.277 −2.000 CaF₂ 616 39 25.599 −36.553 616 40 −139.138 −7.000 Silica617 41 75.025 −63.911 617 42 −347.832 −6.000 Silica 618 43 −60.817−6.000 618 44 −125.144 −9.000 Silica 619 45 146.610 −0.500 619 46−69.321 −9.000 Silica 620 47 482.420 −0.500 620 48 −44.275 −10.217Silica 621 49 −474.223 −0.500 621 50 −19.707 −10.437 Silica 622 51−30.002 −18.250 622 52 Infinity 3.14E−05 N/S IMA Infinity

It is also possible to use a diffractive optic instead of a second glassmaterial to increase the bandwidth. In this case, the diffractive opticmust be manufactured with a specific phase profile to ensure properdiffraction efficiency and angles. Such a design would be possible forthose skilled in the art once presented with this disclosure.

The embodiments illustrated in FIGS. 5 and 6 have two disadvantages.First, the optical axis of the Mangin mirror image relay is at 90degrees to the optical axis defined by the focusing lenses. Thisarrangement can mandate very high angular and position tolerances forthe optical elements in the Mangin mirror image relay. This can resultin manufacturing difficulties and increased system cost. For thisreason, it is desirable to have a minimum number of lens elements inthis 90 degree path. Thus, the 90 degree optical axis can limit thedesign options for this objective. Second, the pupil plane foraperturing and Fourier filtering is located in a noncollimated regioninside the objective. This can produce problems when introducingapertures and filters. Also, because the pupil plane is in anoncollimated region, it is not at the Fourier plane of the object beinginspected. This can significantly reduce the effectiveness of Fourierfiltering.

The fifth embodiment, illustrated in FIG. 7, solves the problems of the90 degree bend issue with respect to the Mangin mirror image relay andthe internal pupil plane. FIG. 7 illustrates an in-line or straight 0.7NA catadioptric objective employing a single glass material. Thearrangement of FIG. 7 also allows for improved design performance andrelaxes manufacturing tolerances. For example, the decentering of anylens element by 5 microns will cause less than one quarter wave of comawithout using any compensation elements. Using element decenters andtilts as compensation elements, the tolerances become even more relaxed.The arrangement of FIG. 7 includes one bend with some lenses after thesecond internal image. These lenses have extremely relaxed tolerancesand tend not to affect the manufacturability of the system. Thearrangement of FIG. 7 also has an external pupil plane 701 foraperturing and Fourier filtering. This pupil plane is in the collimatedregion so it corresponds to the Fourier plane of the object. The objectin the arrangement of FIG. 7 extends from 0.25 mm to 0.75 mm off axisand the design has a bandwidth of 1 nm from 192.8-193.8 nm.

As shown in FIG. 7, light energy or laser energy is transmitted fromenergy source (not shown) into objective 700. Objective 700 includesfirst lens 702 and first field lens 703. This first field lens 703directs light energy to small folding mirror or reflecting surface 704,which directs energy toward focusing lenses 705 and 706 and to Manginmirror 707. Light energy reflects back from Mangin mirror 707 backthrough focusing lenses 706 and 705 and past small folding mirror orreflecting surface 704. Light energy then passes through second fieldlens 708 and through focusing lens arrangement 720, which includes firstfocusing lens 709, second focusing lens 710, third focusing lens 711,fourth focusing lens 712, fifth focusing lens 713, sixth focusing lens714, and seventh focusing lens 715. The specimen or surface to beexamined is not shown in FIG. 7, but is located to the right of theobjective 700 in the orientation shown in FIG. 7. Light energy strikesthe specimen and reflects back through the objective 700 of FIG. 7.Surface data for a system employing the design of FIG. 7 is listed inTable 3.

In a darkfield arrangement, light energy is directed toward the specimensurface as shown in FIG. 2. Light energy may scatter toward theobjective, i.e. toward seventh focusing lens 715 in the design of FIG.7. In such an arrangement, light energy passes back through the system,striking the Mangin mirror 707 and passing through first lens 702.

The design of FIG. 7 provides an optical system with an external pupilplane 701 to support aperturing and Fourier filtering. An aperture canbe used in connection with the FIG. 7 design to provide control of thenumerical aperture of the imaging system. Such an aperture mayoptionally be placed at the pupil plane thereby permitting control ofoverall resolution and depth of focus. Fourier filtering is particularlyuseful in applications such as laser dark field imaging. Fourierfiltering permits filtering surface patterns which repeat by increasingthe signal-to-noise ratio for defects on the surface.

TABLE 3 Surface data for linear design shown in FIG. 7 at 193 nm with a1 nm bandwidth Element Surf Radius Thickness Material Number OBJInfinity Infinity N/S STO Infinity 25.000 701  2 −222.386 4.000 Silica702  3 −28.670 40.503 702  4 39.160 2.500 Silica 703  5 177.023 10.000Silica 703  6 Infinity 0.000 Mirror 704  7 Infinity −98.015 704  8−320.423 −6.000 Silica 705  9 149.893 −142.852 705 10 58.250 −8.000Silica 706 11 210.014 −20.290 706 12 41.193 −9.000 Silica 707 13 81.8489.000 Mirror 707 14 41.193 20.290 707 15 210.014 8.000 Silica 706 1658.250 142.852 706 17 149.893 6.000 Silica 705 18 −320.423 98.015 705 19Infinity 44.416 705 20 70.917 15.000 Silica 708 21 48.487 83.467 708 22326.205 11.000 Silica 709 23 −86.355 83.991 709 24 235.491 9.000 Silica710 25 −111.089 10.357 710 26 −58.901 4.000 Silica 711 27 −3728.69889.493 711 28 45.959 6.365 Silica 712 29 41.432 9.332 712 30 −739.1186.000 Silica 713 31 −79.014 1.000 713 32 44.790 9.000 Silica 714 33182.972 1.000 714 34 22.072 20.822 Silica 715 35 36.911 11.529 715 IMAInfinity N/S

The sixth embodiment presented in FIG. 8 is similar to the fifthembodiment of FIG. 7, but has been optimized for a wavelength of 157 nm.The change in wavelength requires changing the material used from fusedsilica to calcium fluoride. The index of fused silica at a wavelength of193 nm is nearly identical to the index for calcium fluoride at 157 nm,so the design requires no major changes aside from the material.However, the dispersion of calcium fluoride at 157 nm is larger than thedispersion of fused silica at 193 nm, which may require some minorchanges to further optimize the design. The design presented in FIG. 8also provides the option of splitting the Mangin mirror into a frontsurface mirror and a meniscus lens, which can in some cases simplifymanufacturing. This split Mangin mirror approach can be employed on theother catadioptric objective designs of FIGS. 3-9 as well. The objectextends from 0.25 mm to 0.75 mm off axis and the design has a bandwidthof 0.5 nm from 156.75-157.25 nm.

As shown in FIG. 8, light energy or laser energy is transmitted fromenergy source (not shown) and into objective 800. This objective 800also has an external pupil plane 801 as in the design presented in FIG.7. Objective 800 includes first lens 802 and first field lens 803. Thisfirst field lens 803 directs light energy to small folding mirror orreflecting surface 804, which directs energy toward focusing lenses 805,806, and 807 and to mirror surface 808. Light energy reflects back frommirror surface 808 back through focusing lenses 807, 806, and 805 andpast small folding mirror or reflecting surface 804. Light energy thenpasses through second field lens group 820 which includes first fieldlens 809, second fiend lens 810, and third field lens 811. Light thenpasses through focusing lens arrangement 821, which includes firstfocusing lens 812, second focusing lens 813, third focusing lens 814,fourth focusing lens 815, fifth focusing lens 816. The specimen orsurface to be examined is not shown in FIG. 8, but is located to theright of the objective 800 in the orientation shown in FIG. 8. Lightenergy strikes the specimen 817 and reflects back through the objective800 of FIG. 8. Light from specimen can be apertured or Fourier filteredat pupil plane 801 as described in the fifth embodiment and presented inFIG. 7.

The surface data for a system having the objective shown in FIG. 8 islisted in Table 4.

TABLE 4 Surface data for a linear design as shown in FIG. 8 at 157 nmwith a 0.5 nm bandwidth Element Surf Radius Thickness Material NumberOBJ Infinity Infinity N/S STO Infinity 25.000 801  2 −228.090 4.000 CaF₂802  3 −26.271 34.743 802  4 27.340 2.500 CaF₂ 803  5 78.838 10.000 803 6 Infinity 0 Mirror 804  7 Infinity −75.368 804  8 332.074 −6.000 CaF₂805  9 75.615 −84.484 805 10 53.058 −7.000 CaF₂ 806 11 129.105 −12.000806 12 40.981 −7.000 CaF₂ 807 13 128.091 −7.480 807 14 69.614 7.480Mirror 808 15 128.091 7.000 CaF₂ 807 16 40.981 12.000 807 17 129.1057.000 CaF₂ 806 18 53.058 84.484 806 19 75.615 6.000 CaF₂ 805 20 332.07475.368 805 21 Infinity 39.173 22 24.018 15.000 CaF₂ 809 23 26.501 24.354809 24 −15.238 13.419 CaF₂ 810 25 −26.901 1.000 810 26 355.973 7.000CaF₂ 811 27 −56.508 110.232 811 28 58.858 10.000 CaF₂ 812 29 1338.3076.0469 812 30 −54.890 10.000 CaF₂ 813 31 −72.556 26.319 813 32 −308.9176.500 CaF₂ 814 33 −95.467 1.000 814 34 34.0794 8.000 CaF₂ 815 35 110.3001.000 815 36 16.407 9.697 CaF₂ 816 37 29.683 11.927 816 IMA Infinity

The seventh embodiment illustrated in FIG. 9 has similarities to thefifth and sixth embodiments presented in FIGS. 7 and 8. The designpresented in FIG. 9 uses the straight through 0.7 NA catadioptricapproach to allow more design flexibility, improve performance, andrelax the manufacturing tolerances. In addition, similar to the designof FIG. 6, a second glass material, calcium fluoride, is used toincrease the correction bandwidth. The design of FIG. 9 is correctedfrom 193 to 203 nm. The FIG. 9 design has one calcium fluoride elementin the eyepiece group and one calcium fluoride/silica doublet near theintermediate image. The object extends from 0.25 mm to 0.75 mm off axisand the design has a bandwidth from 193.3-203.3 nm.

As shown in FIG. 9, light energy or laser energy is transmitted fromenergy source (not shown) and into objective 900. As in objectiveembodiments presented in FIG 7 and FIG 8, an external pupil plane 901 isavailable for aperturing and fourier filtering. Objective 900 includesfirst lens 902 and first field lens arrangement 930, which includesfirst field lens 903 and second field lens 904. This first field lensarrangement 930 directs light energy to small folding mirror orreflecting surface 905, which reflects energy toward focusing lenses 906and 907 and to Mangin mirror 908. Light energy reflects back from Manginmirror 908 back through focusing lenses 907 and 906, and past smallfolding mirror or reflecting surface 905. Light energy then passesthrough second field lens arrangement 931, which includes third fieldlens 909, fourth field lens 910, and fifth field lens 911. Light thenpasses through focusing lens arrangement 932, which includes firstfocusing lens 912, second focusing lens 9131, third focusing lens 914,fourth focusing lens 915, fifth focusing lens 916, sixth focusing lens917, and seventh focusing lens 918. The specimen or surface 919 to beexamined is not shown in FIG. 9, but is located to the right of theobjective 900 in the orientation shown in FIG. 9. Light energy strikesthe specimen and reflects back through the objective 900 of FIG. 9.

The surface data for the design of FIG. 9 is listed in Table 5.

TABLE 5 Surface data for a linear design as in FIG. 9 at 193 nm, with a10 nm bandwidth Element Surf Radius Thickness Material Number OBJInfinity Infinity N/S STO Infinity 35.063 901  2 527.763 4.000 Silica902  3 −32.542 8.204 902  4 572.044 2.000 Silica 903  5 16.118 1.447 903 6 17.545 5.000 CaF2 904  7 −65.290 35.838 904  8 Infinity 0.000 Mirror905  9 Infinity −96.873 905 10 −795.110 −10.000 Silica 906 11 92.663−199.957 906 12 64.768 −8.000 Silica 907 13 281.874 −14.019 907 1438.871 −9.000 Silica 908 15 80.841 9.000 Mirror 908 16 38.871 14.019 90817 281.874 8.000 Silica 907 18 64.768 199.957 907 19 92.663 10.000Silica 906 20 −795.110 96.873 906 21 Infinity 9.399 906 22 −16.045 2.000Silica 909 23 24.034 0.217 909 24 24.751 4.000 CaF2 910 25 −16.51522.166 910 26 38.990 4.000 Silica 911 27 41.231 164.091 911 28 1232.00410.000 Silica 9121  29 −95.859 1.000 912 30 79.148 9.000 Silica 913 31−1367.718 33.541 913 32 −59.580 4.000 Silica 914 33 201.391 45.680 91434 173.228 4.500 Silica 915 35 58.668 7.500 915 36 −127.932 6.000 Silica916 37 −41.246 1.000 916 38 31.082 9.000 Silica 917 39 153.068 1.000 91740 17.627 12.491 Silica 918 41 35.390 11.566 918 IMA Infinity

A complete imaging system, such as described in embodiments 1-2 andpresented in FIGS. 1-2, requires an objective, such as described inembodiments 3-6 and presented in FIGS. 3-9, and image forming optics.The image forming optics can employ different designs. The image formingoptics can be a static tube lens capable of producing a singlemagnification. In a static tube lens arrangement, differentmagnifications are achieved by using different tube lenses, which may bereadily designed by one skilled in the art. Another image forming opticdesign is a zooming tube lens. A zooming tube lens requires only asingle optical system to produce a wide range of magnifications.Examples of two different types of zooming tube lenses are presented inembodiments 7 and 8 below. Images forming optics must be corrected forthe wavelength and spectral bandwidth of the illumination source.

The seventh embodiment 1000 illustrated in FIG. 10 is an image formingtube lens employing a varifocal two motion zoom to changemagnifications. The design methodology is similar to that presented inthe U.S. patent application Ser. No. 08/908,247, entitled“Ultra-Broadband UV Microscope Imaging System with Wide Range ZoomCapability,” filed on Aug. 7, 1997, of which this invention is acontinuation in part. The design consists of a stationary doublet 1020,a zooming group 1021, and a detector group 1022. Pupil plane 1001 isshown. The stationary doublet includes a first doublet lens 1002 and asecond doublet lens 1003. The zooming group consists of a first zoomlens 1004, a second zoom lens 1005, and a third zoom lens 1006. Thedetector group 1022 consists of a protective window 1007 and a detector1008. Different magnifications are achieved by moving the zoom groupalong the optical axis and then repositioning the detector with theprotective window to refocus. Three example magnifications are shown inFIG. 11. The low magnification zoom position 1101 has the shortest totallength with the zoom group 1121 farthest away from the doublet 1120. Formedium magnification 1102 the total length from the doublet 1120 to thedetector group 1122 increases and the distance from the doublet 1120 tothe zoom group 1121 decreases. For high magnification 1103 the maximumdistance from the doublet 1120 to the detector group 1122 is achievedand the distance from the doublet 1120 to the zoom group 1121 isminimized. This design is capable of magnifications from 38 times togreater than 152 times. Over the magnification range from 38 times to152 times, the total length of the system from the doublet 1020 to thedetector 1008 changes from 320 mm to 880 mm. The three lenses that movein the zooming group 1021 are moved a total of 68 mm. The pupil 1201 ofthe design 1200 in FIG. 12 is matched to the design presented in FIG. 7.One skilled in the art, when presented with this disclosure, couldreadily design a similar tube lens for use with the objective designspresented in FIGS. 3-9 as well as other designs that are within thescope of this invention. It is also possible for someone skilled in theart, when presented with this disclosure, to design a varifocal twomotion zoom with other magnifications and magnification ranges.

The surface data for the design of FIG. 10 is listed in Table 6.

TABLE 6 Surface data for an image forming tube lens as in FIG. 110 at193 nm with a 1.5 nm bandwidth Surface Surf Radius Thickness Glassnumber OBJ Infinity Infinity N/S STO Infinity 20.000 1001 2 121.6003.000 Caf2 1002 3 −77.915 0.500 1002 4 −78.860 2.000 Silica 1003 5−1820.981 90.732 1003 6 106.439 2.500 Caf2 1004 7 59.162 99.528 1004 850.266 4.000 Silica 1005 9 124.701 14.006 1005 10  −687.986 3.000 Caf21006 11  53.069 470.445 1006 12  Infinity 1.000 Silica 1007 13  Infinity1.000 1007 IMA Infinity 1008

The eighth embodiment illustrated in FIG. 12 is an image forming tubelens using an optically compensated single motion zoom to changemagnifications. The design methodology is similar to that in a paper byDavid R. Shafer, “Catadioptric optically compensated zooming system withone moving element” Proc SPIE Vol. 2539, pp. 235-240. The designconsists of a first doublet 1220, a zooming group 1221, a mirror 1206, asecond doublet 1222 including lens 1208 and lens 1209, and a detector1210. The first doublet consists of a doublet lens 1202 and a followingdoublet lens 1203. The zooming group consists of a first zoom lens 1204and a second zoom lens 1205. Surface 1207 is also provided. Differentmagnifications are achieved by moving the zoom group 1221 along theoptical axis of the first doublet 1220, the zoom group 1221, and themirror 1206. No other motion is required.

Three example magnifications are shown in FIG. 13. The low magnificationzoom position 1301 has the zoom group 1321 very close to the firstdoublet 1320. For the medium magnification 1302, the zoom group is inbetween the first doublet 1320 and the mirror 1304. For the highmagnification 1303 the zoom group 1321 is relatively close to the mirror1304. The design is capable of magnifications from 60 times to greaterthan 180 times.

The pupil 1201 of the design in FIG. 12 is matched to the designpresented in FIG. 7. The surface data for the design of FIG. 12 islisted in Table 7.

TABLE 7 Surface data for an image forming tube lens as in FIG. 12 at 193nm with a 1.5 nm bandwidth Surface Surf Radius Thickness Glass numberOBJ Infinity Infinity N/S STO Infinity 20.000 1201  2 — 0.000 — N/S  3123.897 8.000 caf2 1202  4 −213.430 33.518 1202  5 −119.986 4.000 silica1203  6 206.676 315.675 1203  7 24267.100 4.000 caf2 1204  8 117.95910.577 1204  9 125.844 5.000 silica 1205 10 325.138 319.238 1205 11−1125.668 −319.238 MIRROR 1206 12 325.138 −5.000 silica 1205 13 125.844−10.577 1205 14 117.959 −4.000 caf2 1204 15 24267.100 −305.678 1204 16 —0.000 — N/S 17 Infinity 0.000 MIRROR 1207 18 — 0.000 — N/S 19 Infinity36.000 N/S 20 39.403 6.000 silica 1208 21 81.584 0.500 1208 22 50.6144.000 silica 1209 23 33.375 11.140 1209 IMA Infinity 1210

While the invention has been described in connection with specificembodiments thereof, it will be understood that the invention is capableof further modifications. This application is intended to cover anyvariations, uses or adaptations of the invention following, in general,the principles of the invention, and including such departures from thepresent disclosure as come within known and customary practice withinthe art to which the invention pertains.

1. A combined catadioptric lensing and mirror optical inspection systemcomprising: a fold mirror configured to receive light energy; a Manginmirror arrangement configured to receive light energy from said foldmirror; a secondary field lens arrangement configured to receive lightenergy from said Mangin mirror arrangement; and a secondary focusinglens arrangement configured to receive light energy from said secondaryfield lens arrangement; wherein output rays provided by said Manginmirror arrangement are transmitted along a first axis displaced from asecond axis along which input rays are transmitted toward said Manginmirror arrangement, and wherein light energy is received by said Manginmirror arrangement along a path free of separately formed lenses.
 2. Thesystem of claim 1, further comprising a second fold mirror configured toreceive energy from said Mangin mirror arrangement and pass energy tosaid secondary field lens arrangement.
 3. The system of claim 1, whereinmultiple lenses of the system are formed of a single material comprisingone from the group of: fused silica; and calcium fluoride.
 4. The systemof claim 1, wherein said fold mirror folds light energy at an angle ofapproximately 90 degrees.
 5. The system of claim 1, wherein said systemprovides a working distance greater than six millimeters.
 6. The systemof claim 1, wherein said combined catadioptric lensing and mirroroptical inspection system has off-axis orientation wherein a secondimage selected from output rays provided by said Mangin mirrorarrangement is physically displaced from a first image selected frominput rays transmitted toward said Mangin mirror arrangement.
 7. Thesystem of claim 1, further comprising: a primary focusing lensarrangement; and a primary field lens arrangement configured to receivelight energy from said primary focusing arrangement.
 8. The system ofclaim 1, wherein the system is free of internal beamsplitters.
 9. Thesystem of claim 1, wherein light energy is imparted to said system byone from the group of: an unnarrowed excimer laser; a lamp having abandpass filter; a frequency converted laser; and a deuterium lamp. 10.The system of claim 1, further comprising: an illumination source forproducing said light energy; image forming optics; and a detector.
 11. Amethod for inspecting a specimen, comprising: folding received lightenergy off a folding mirror, thereby providing a first image; impartinglight energy received from said folding mirror to a Mangin mirror via afirst path free of separately formed lenses; directing light energyreceived from said Mangin mirror to a second folding mirror proximatethe folding mirror via a second path free of separately formed lenses,whereby light energy directed from said Mangin mirror forms a secondimage slightly displaced from and proximate to said first image.
 12. Themethod of claim 11, further comprising: receiving light energy from alight energy source; and imparting light energy from said light energysource through a first lensing arrangement, a field lensing arrangement,and to said folding mirror.
 13. The method of claim 11, furthercomprising passing light energy to image forming optics and subsequentlyto a detector after said directing.
 14. The method of claim 11, furthercomprising separating elements used in connection with said method fromsaid specimen by at least six millimeters.
 15. The method of claim11,further comprising fourier filtering energy received from saiddirecting step.
 16. The method of claim 11, further comprising passingsaid light energy through a lensing arrangement subsequent to saiddirecting.
 17. An objective for inspecting a specimen, comprising: afold mirror for folding received energy, said fold mirror providinginput rays having a predetermined orientation; and a refractivelens/mirror arrangement comprising an integrally formed second surfacespherical mirror comprising a spherical surface mounted to a curvedreflective surface, the spherical surface correcting sphericalaberration of the curved reflective surface, the refractive lens/mirrorarrangement configured to receive input rays from said fold mirror alonga path free of separately formed lenses; wherein input rays providedfrom said fold mirror form a first image, and wherein transmission raystransmitted from said refractive lens/mirror element arrangement form asecond image slightly displaced from and proximate to said first image.18. The objective of claim 17, further comprising: a primary focusinglens arrangement; a primary field lens arrangement; a secondary fieldlens arrangement; and a secondary focusing lens arrangement.
 19. Theobjective of claim 18, further comprising a second fold mirrorconfigured to receive energy from said refractive lens/mirrorarrangement and pass energy to said secondary field lens arrangement.20. The objective of claim 18, wherein said primary focusing lensarrangement comprises at least one lens, said primary field lensarrangement comprises at least one lens, said secondary field lensarrangement comprises at least one lens, said secondary focusing lensarrangement comprises at least one lens, said objective forming a pupilplane external to the objective.
 21. The objective of claim 18, whereinall lenses are constructed of a single material and said single materialcomprises one from the group of: fused silica; and calcium fluoride. 22.The objective of claim 17, wherein said objective provides a numericalaperture in excess of 0.7.
 23. The objective of claim 17, wherein saidobjective is free of internal beamsplitters.
 24. The objective of claim17, wherein light energy is imparted to said objective by one from thegroup of: an unnarrowed excimer laser; a lamp having a bandpass filter;a frequency converted laser; and a deuterium lamp.
 25. An apparatus forinspecting a specimen, comprising: means for folding light energy, saidfolding means configured to provide a first image projected along afirst path free of separately formed lenses toward a refractivelens/mirror arrannement; and further folding means configured to:receive light energy from said refractive lens/mirror arrangement alonga second path free of separately formed lenses; and direct light energythrough a lensing arrangement; whereby light energy directed from saidlens/mirror arrangement forms a second image slightly displaced from andproximate to said first image.
 26. The apparatus of claim 25, furthercomprising: first means for focusing; a primary field lens arrangement;a secondary field lens arrangement; and second means for focusing. 27.The apparatus of claim 26, wherein transmitted energy to said apparatusis configured to pass sequentially to said first focusing means, saidprimary field lens arrangement, said folding means, said refractivelens/mirror element, said secondary field lens arrangement, and saidsecond focusing means.
 28. The apparatus of claim 27, wherein a secondfolding means is configured to receive energy from said refractivelens/mirror arrangement and pass energy to said secondary field lensarrangement.
 29. The apparatus of claim 26, wherein said first focusingmeans comprises at least one lens, said primary field lens arrangementcomprises at least one lens, said secondary field lens arrangementcomprises at least one lens, said second focusing means comprises atleast one lens, and wherein all lenses in the apparatus are constructedusing a single material.
 30. The apparatus of claim 29, wherein saidsingle material comprises one from the group of: fused silica; andcalcium fluoride.
 31. The apparatus of claim 25, wherein said apparatusprovides a numerical aperture in excess of 0.7.
 32. The apparatus ofclaim 25, wherein said apparatus is free of internal beamsplitters. 33.The apparatus of claim 25, wherein light energy is imparted to saidapparatus by one from the group comprising: an unnarrowed excimer laser;a lamp having a bandpass filter; a frequency converted laser; and adeuterium lamp.
 34. An objective comprising: a mangin lens/mirrorelement configured to receive light energy; multiple planar reflectingsurfaces configured to receive light energy from said mangin lens/mirrorelement along paths unobscured by separately formed lenses; a secondaryfield lens arrangement configured to receive light energy from at leastone of said multiple planar reflecting surfaces; and a secondaryfocusing lens arrangement configured to receive light energy from saidsecondary field lens arrangement; wherein said objective has an off axisorientation whereby output rays provided by said mangin lens/mirrorelement are physically displaced from output rays transmitted towardsaid mangin lens/mirror element.
 35. The objective of claim 34 furthercomprising: a primary focusing lens arrangement; and a primary fieldlens arrangement configured to receive light energy from said primaryfocusing lens arrangement and transmit light energy toward one planarreflecting surface.
 36. The objective of claim 34 wherein chromaticcorrection central wavelength is less than or equal to approximately 365nm.
 37. The objective of claim 34 where all lenses of the objective areconstructed of a single glass material.
 38. The objective of claim 34wherein said multiple plane reflecting surfaces fold light at an angleof approximately 90 degrees.
 39. The objective of claim 34 wherein theobjective is free of internal beamsplitters.
 40. The objective of claim34 wherein all lenses in said objective are fashioned from one from agroup comprising: two glass materials; and one glass material and atleast one diffractive surface.
 41. A device for inspecting a specimen,comprising: a fold mirror for folding received energy, said fold mirrorproviding input rays having a predetermined orientation; and arefractive lens/mirror element comprising an integrally formed secondsurface spherical mirror comprising a spherical surface mounted to acurved reflective surface, the spherical surface correcting sphericalaberration of the curved reflective surface, said refractive lens/mirrorelement configured to receive input rays from said fold mirror along apath free of separately formed lenses; wherein light energy directedfrom said refractive lens/minor element forms a second image slightlydisplaced from and proximate to a first image formed by input rays ofthe fold mirror.
 42. The device of claim 41, further comprising: aprimary focusing lens arrangement; a primary field lens arrangement; asecondary field lens arrangement; and a secondary focusing lensarrangement.
 43. The device of claim 42, wherein transmitted energy tosaid device is configured to pass sequentially to said primary focusinglens arrangement, said primary field lens arrangement, said fold mirror,said refractive lens/mirror element, said secondary field lensarrangement, and said secondary focusing lens arrangement.
 44. Anobjective for inspecting a specimen, comprising: a mangin lens/mirrorelement; multiple planar reflecting surfaces; wherein said objective hasan off axis orientation whereby output rays provided by said manginlens/mirror element are axially displaced from input rays received bysaid mangin lens/mirror element along paths free of separately formedlenses and transmitted to and from said multiple planar reflectingsurfaces, and further wherein light energy reflected from at least oneof said multiple reflecting surfaces passes through a lensingarrangement comprising a plurality of lenses.
 45. The objective of claim44, further comprising: a primary focusing lens arrangement; a primaryfield lens arrangement; a secondary field lens arrangement; and asecondary focusing lens arrangement.
 46. The system of claim 45 whereinsaid primary focusing lens arrangement comprises at least one lens, saidprimary field lens arrangement comprises at least one lens, and saidsecondary focusing lens arrangement comprises at least one lens.
 47. Thesystem of claim 46 wherein all lenses are formed from a single material.48. The system of claim 46 wherein the multiple planar reflectingsurfaces are proximately positioned.